{"title":"Stephen A Campbell","description":"\u003cp\u003eDelve into the gripping thrillers of Stephen A. Campbell, where suspense meets cutting-edge technology. Perfect for fans of Daniel Suarez and Michael Crichton, discover tales of tomorrow, available here.\u003c\/p\u003e","products":[{"product_id":"science-and-engineering-of-microelectronic-fabrication-book-stephen-a-campbell-9780195105087","title":"The Science and Engineering of Microelectronic Fabrication","description":"This guide can be used as a textbook for both first year graduate and upper level undergraduate courses in microelectronic fabrication. It is also a useful reference for professionals.","brand":"WoB","offers":[{"title":"US \/ GOOD \/ SBYB","offer_id":49754429260049,"sku":"CIN0195105087G","price":0.0,"currency_code":"GBP","in_stock":false},{"title":"US \/ WELL_READ \/ SBYB","offer_id":50264701174033,"sku":"CIN0195105087A","price":0.0,"currency_code":"GBP","in_stock":false},{"title":"GB \/ VERY_GOOD \/ INTERNAL","offer_id":52621019709713,"sku":"GOR005053885","price":0.0,"currency_code":"GBP","in_stock":false},{"title":"US \/ VERY_GOOD \/ SBYB","offer_id":53264063791377,"sku":"CIN0195105087VG","price":0.0,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0784\/4072\/6801\/files\/0195105087.jpg?v=1751195433"},{"product_id":"fabrication-engineering-at-the-micro-and-nanoscale-book-stephen-a-campbell-9780195320176","title":"Fabrication Engineering at the Micro and Nanoscale","description":"Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. Completely revised and updated, the text covers the entire basic unit processes used to fabricate integrated circuits and other devices. It includes more worked examples, illustrations, and expands coverage of the frontiers of fabrication processes. The physics and chemistry of each process are introduced along with descriptions of the equipment used to carry out the processes. The text uses a popular commercial process simulation suite-the Silvaco Athena(R) set of codes-to provide meaningful examples of many of the basic processes including diffusion, oxidation, lithography, and deposition. The book goes on to discuss the integration of these basic unit processes into various technologies, concentrating on CMOS transistors. The text breaks down the material into treatments on the concepts of process modules, thermal budget, advanced architectures, and the use of channel strain for improved performance.","brand":"WoB","offers":[{"title":"US \/ WELL_READ \/ SBYB","offer_id":49950176411921,"sku":"CIN0195320174A","price":0.0,"currency_code":"GBP","in_stock":false},{"title":"US \/ GOOD \/ SBYB","offer_id":50135260823825,"sku":"CIN0195320174G","price":0.0,"currency_code":"GBP","in_stock":false},{"title":"US \/ VERY_GOOD \/ SBYB","offer_id":52089524093201,"sku":"CIN0195320174VG","price":0.0,"currency_code":"GBP","in_stock":false},{"title":"GB \/ NEW \/ INGRAM","offer_id":52149616640273,"sku":"NLS9780195320176","price":0.0,"currency_code":"GBP","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0784\/4072\/6801\/files\/0195320174.jpg?v=1751290812"},{"product_id":"science-and-engineering-of-microelectronic-fabrication-book-stephen-a-campbell-9780195136050","title":"The Science and Engineering of Microelectronic Fabrication","description":"\"The Science and Engineering of Microelectronic Fabrication\" provides a thorough introduction to the field of microelectronic processing. Geared toward a wide audience, it may be used for upper-level undergraduate or first year graduate courses and as a handy reference for professionals. The text covers all the basic unit processes used to fabricate integrated circuits, including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering, and chemical vapor deposition. Advanced processing topics such as rapid thermal processing, non-optical lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacturing of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity\/performance tradeoffs are evaluated along with a description of the current state-of-the-art devices. Each chapter includes sample problems with solutions. The text makes use of the process simulation package SUPREM to demonstrate impurity profiles of practical interest. The new edition includes complete chapter coverage of MEMS including: Fundamentals of Mechanics, Stress in Thin Films, Mechanical to Electrical Transduction, Mechanics of Common MEMS Devices, Bulk Micromachining Etching Techniques, Bulk Micromachining Process Flow, Surface Micromachining Basics, Surface Micromachining Process Flow, MEMS Actuators, and High Aspect Ratio Microsystems Technology (HARMST).","brand":"WoB","offers":[{"title":"US \/ GOOD \/ SBYB","offer_id":50413171245329,"sku":"CIN0195136055G","price":0.0,"currency_code":"GBP","in_stock":false},{"title":"US \/ VERY_GOOD \/ SBYB","offer_id":50440777564433,"sku":"CIN0195136055VG","price":0.0,"currency_code":"GBP","in_stock":false},{"title":"GB \/ VERY_GOOD \/ INTERNAL","offer_id":52889037832465,"sku":"GOR011586825","price":0.0,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0784\/4072\/6801\/files\/0195136055.jpg?v=1751290689"},{"product_id":"fabrication-engineering-at-the-micro-and-nanoscale-book-stephen-a-campbell-9780199861224","title":"Fabrication Engineering at the Micro- and Nanoscale","description":"Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.   With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.","brand":"WoB","offers":[{"title":"- \/ - \/ -","offer_id":51612284551441,"sku":"","price":0.0,"currency_code":"GBP","in_stock":true},{"title":"US \/ GOOD \/ SBYB","offer_id":51612285239569,"sku":"CIN0199861226G","price":0.0,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0784\/4072\/6801\/files\/0199861226.jpg?v=1750876612"}],"url":"https:\/\/www.worldofbooks.com\/collections\/author-books-by-stephen-a-campbell.oembed","provider":"World of Books ","version":"1.0","type":"link"}