A User's Guide to Vacuum Technology by John F O'hanlon

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A User's Guide to Vacuum Technology by John F O'hanlon

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Zusammenfassung

This volume introduces the reader to the theory and practice of modern vacuum technology, with applications. It focuses on the understanding, operation and selection of equipment for vacuum processes used in semiconductor, optical and related technologies.

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A User's Guide to Vacuum Technology by John F O'hanlon

This book introduces the reader to the theory and practice of modern vacuum technology, with applications. It focuses on the understanding, operation and selection of equipment for vacuum processes used in semiconductor, optical and related technologies. This second edition has new information on components, lubrication, pump fluids and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system. The book will be of benefit to electrical and mechanical engineers and graduate students. The previous edition of this book was published in 1980.

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SKU Nicht verfügbar
ISBN 13 9780471812425
ISBN 10 0471812420
Titel A User's Guide to Vacuum Technology
Autor John F O'hanlon
Buchzustand Nicht verfügbar
Bindungsart Hardback
Verlag John Wiley and Sons Ltd
Erscheinungsjahr 1989-05-08
Seitenanzahl 512
Hinweis auf dem Einband Die Abbildung des Buches dient nur Illustrationszwecken, die tatsächliche Bindung, das Cover und die Auflage können sich davon unterscheiden.