Contents Introduction Jurgen Jahns, Karl-Heinz Brenner Microstructure Technology for Optical Component Fabrication E.-Bernhard Kley, Lars-Christian Wittig, Andreas Tunnermann Microlithographic Pattern Generation for Optics Bernd Schnabel Modeling of Free-Space Microoptics Uwe D. Zeitner, Peter Schreiber, Wolfgang Karthe Modeling of Photonic Waveguides and Circuits Reinhard Marz Modeling of Waveguide-Optical Devices by the Method of Lines Reinhold Pregla Microoptics using the LIGA Technology Ines Frese Modular Fabrication Concept for LIGA-based Microoptics Jurgen Mohr, Arndt Last, Ulrike Wallrabe Fabrication of optical waveguides in dielectrics by femtosecond laser pulses Stefan Nolte, Matthias Will, Jonas Burgho., Andreas Tunnermann Integrated Planar Erbium-Doped Waveguide Amplifiers: Technological and Optical Considerations Matthias Brinkmann, Ste.en Reichel, Joseph S. Hayden Two-Dimensional Photonic Crystal Waveguides Cecile Jamois, Ralf Boris Wehrspohn, Christian Hermann, Ortwin Hess, Lucio Claudio Andreani, Ulrich Gosele Interferometric Measurement of Microlenses Including Cylindrical Lenses Norbert Lindlein, Jurgen Lamprecht, Johannes Schwider The Integrated Microlens - The Development of Vertical and Horizontal Integration Masahiro Oikawa Planar-Integrated Free-Space Optics - from Components to Systems Matthias Gruber, Jurgen Jahns Microoptical Structures for Semiconductor Light Sources Werner Spath Microoptic Sensors Albrecht Brandenburg Fiber Optic Gyros and MEMS Accelerometers Andreas Rasch, Eberhard Handrich, Gunter Spahlinger, Martin Hafen, Sven Voigt, Michael Weingartner Microoptical Applications in Spectrally Encoded Fiber Sensor Systems Hartmut Bartelt Micro-Optical Beam Shaping for Supershort-Pulse Lasers Rudiger Grunwald,Volker Kebbel Index