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Introductory MEMS By Thomas M. Adams

Introductory MEMS by Thomas M. Adams

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Summary

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.

This book will be specially printed for your order, which means it may take a little longer to arrive (5 days). We do this to cut down on waste & to help protect our planet.

Introductory MEMS Summary

Introductory MEMS: Fabrication and Applications by Thomas M. Adams

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter.

Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.

Table of Contents

Fabrication.- The substrate and adding material to it.- Creating and transferring patterns#x2014;Photolithography.- Creating structures#x2014;Micromachining.- Solid mechanics.- Applications.- Thinking about modeling.- MEMS transducers#x2014;An overview of how they work.- Piezoresistive transducers.- Capacitive transducers.- Piezoelectric transducers.- Thermal transducers.- to microfluidics.- Laboratories.- Microfabrication laboratories.

Additional information

NLS9781489984210
9781489984210
1489984216
Introductory MEMS: Fabrication and Applications by Thomas M. Adams
New
Paperback
Springer-Verlag New York Inc.
2014-09-07
440
N/A
Book picture is for illustrative purposes only, actual binding, cover or edition may vary.
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