Glow Discharge Processes by Brian Chapman

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Glow Discharge Processes by Brian Chapman

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

Brian Chapman is the author of Glow Discharge Processes: Sputtering and Plasma Etching, published by Wiley.

SKU Unavailable
ISBN 13 9780471078289
ISBN 10 047107828X
Title Glow Discharge Processes
Author Brian Chapman
Condition Unavailable
Binding Type Hardback
Publisher John Wiley & Sons Inc
Year published 1980-11-05
Number of pages 432
Cover note Book picture is for illustrative purposes only, actual binding, cover or edition may vary.