
Glow Discharge Processes by Brian Chapman
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.Brian Chapman is the author of Glow Discharge Processes: Sputtering and Plasma Etching, published by Wiley.
| SKU | Unavailable |
| ISBN 13 | 9780471078289 |
| ISBN 10 | 047107828X |
| Title | Glow Discharge Processes |
| Author | Brian Chapman |
| Condition | Unavailable |
| Binding Type | Hardback |
| Publisher | John Wiley & Sons Inc |
| Year published | 1980-11-05 |
| Number of pages | 432 |
| Cover note | Book picture is for illustrative purposes only, actual binding, cover or edition may vary. |
| Note | Unavailable |







