Fabrication Engineering at the Micro- and Nanoscale by Stephen A Campbell

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Fabrication Engineering at the Micro- and Nanoscale by Stephen A Campbell

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices. With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.
This is one of the best texts in the fieldIt provides the most complete coverage of fabrication techniques. * Xian-An Cao, West Virginia University *
I like Campbell's style and enjoy reading the text. The material is appropriate for the intended audience and there are good summaries of background material. * Trevor Thornton, Arizona State University *
Stephen A. Campbell is the Bordeau Professor of Electrical and Computer Engineering at the University of Minnesota and a fellow of IEEE.
SKU Unavailable
ISBN 13 9780199861224
ISBN 10 0199861226
Title Fabrication Engineering at the Micro- and Nanoscale
Author Stephen A Campbell
Series The Oxford Series In Electrical And Computer Engineering
Condition Unavailable
Binding Type Paperback
Publisher Oxford University Press Inc
Year published 2012-12-20
Number of pages 688
Cover note Book picture is for illustrative purposes only, actual binding, cover or edition may vary.