Introduction to Semiconductor Manufacturing Technology
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Introduction to Semiconductor Manufacturing Technology by Hong Xiao
IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. Introduction to Semiconductor Manufacturing Technologies, Second Edition thoroughly describes the complicated processes with minimal mathematics, chemistry, and physics; it covers advanced concepts while keeping the contents accessible to readers without advanced degrees. Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology. The text focuses on current fabrication technologies, but older technologies are discussed for historical context.| SKU | Unavailable |
| ISBN 13 | 9781510616530 |
| ISBN 10 | 1510616535 |
| Title | Introduction to Semiconductor Manufacturing Technology |
| Author | Hong Xiao |
| Series | Press Monographs |
| Condition | Unavailable |
| Binding Type | Paperback |
| Publisher | SPIE Press |
| Year published | 2012-11-30 |
| Number of pages | 698 |
| Cover note | Book picture is for illustrative purposes only, actual binding, cover or edition may vary. |
| Note | Unavailable |