Microelectronic Applications of Chemical Mechanical Planarization by Yuzhuo Li

Microelectronic Applications of Chemical Mechanical Planarization by Yuzhuo Li

This book provides systematic and comprehensive description about the current state of CMP technology. It includes the important fundamentals and basic science as well, making the book fit as an introduction to CMP newcomers and a valuable reference source for professionals.

YUZHUO LI is a tenured professor in the Department of Chemistry and a member of the Center for Advanced Materials Processing (CAMP) at Clarkson University in Potsdam, New York. He is a member of the American Chemical Society, Chinese American Chemical Society, Materials Research Society, and The Electrochemical Society. He also holds guest professorships at several Chinese universities, including Yangzhou University and Sun Yat-Sen University.

SKU	Unavailable
ISBN 13	9780471719199
ISBN 10	0471719196
Title	Microelectronic Applications of Chemical Mechanical Planarization
Author	Yuzhuo Li
Condition	Unavailable
Binding Type	Hardback
Publisher	John Wiley & Sons Inc
Year published	2007-11-13
Number of pages	760
Cover note	Book picture is for illustrative purposes only, actual binding, cover or edition may vary.