Fundamental Principles of Optical Lithography by Chris Mack

Fundamental Principles of Optical Lithography by Chris Mack

Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

Chris A. Mack, Vice-President of Lithography Technology, Lithoguru.com.

SKU	Unavailable
ISBN 13	9780470727300
ISBN 10	0470727306
Title	Fundamental Principles of Optical Lithography
Author	Chris Mack
Condition	Unavailable
Binding Type	Paperback
Publisher	John Wiley & Sons Inc
Year published	2007-11-16
Number of pages	544
Cover note	Book picture is for illustrative purposes only, actual binding, cover or edition may vary.