Fundamentals of Microfabrication by Marc J Madou

Fundamentals of Microfabrication by Marc J Madou

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter

Marc J. Madou, University of California, Irvine USA.

SKU	Unavailable
ISBN 13	9780849308260
ISBN 10	0849308267
Title	Fundamentals of Microfabrication
Author	Marc J Madou
Condition	Unavailable
Binding Type	Hardback
Publisher	Taylor & Francis Inc
Year published	2002-03-13
Number of pages	752
Cover note	Book picture is for illustrative purposes only, actual binding, cover or edition may vary.