Glow Discharge Processes by Brian Chapman

Name: Glow Discharge Processes
Brand: WoB
SKU: 9780471078289
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Glow Discharge Processes by Brian Chapman

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

Brian Chapman is the author of Glow Discharge Processes: Sputtering and Plasma Etching, published by Wiley.

SKU	Unavailable
ISBN 13	9780471078289
ISBN 10	047107828X
Title	Glow Discharge Processes
Author	Brian Chapman
Condition	Unavailable
Binding Type	Hardback
Publisher	John Wiley & Sons Inc
Year published	1980-11-05
Number of pages	432
Cover note	Book picture is for illustrative purposes only, actual binding, cover or edition may vary.
Note	Unavailable

Glow Discharge Processes by Brian Chapman

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