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Micro Electro Mechanical System Design by James J Allen

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Part of Mechanical Engineering series

Summary

Offers information helpful to develop a successful micro electro mechanical system (MEMS) design. This work explains the design process by illustrating the range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed.

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Micro Electro Mechanical System Design by James J Allen

Offers information helpful to develop a successful micro electro mechanical system (MEMS) design. This work explains the design process by illustrating the range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed.

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"This book covers all aspects of MEMS design with large numbers of picturesIt is a very good reference book for everyone interested in the field. It is also an excellent supplementary text for a course on solid state devices."

– In IEEE Circuits & Devices, September/ October 2006, Vol. 22, No. 5

SKU Unavailable
ISBN 13 9780824758240
ISBN 10 0824758242
Title Micro Electro Mechanical System Design
Author James J Allen
Series Mechanical Engineering
Condition Unavailable
Binding Type Hardback
Publisher CRC Press
Year published 2005-07-08
Number of pages 492
Cover note Book picture is for illustrative purposes only, actual binding, cover or edition may vary.

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