Plasma Etching by M Sugawara
The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.-
Electron & Nuclear Spin Dynamics in Semiconductor Nanostructures
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Hybrid Phonons in Nanostructures
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Plasmonic Effects in Metal-Semiconductor Nanostructures
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Physics of Semiconductors in High Magnetic Fields
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Surface Electronic Transport Phenomena in Semiconductors
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Semiconductor Detector Systems
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Theory of Optical Processes in Semiconductors
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Concepts in Spin Electronics
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Intense Terahertz Excitation of Semiconductors
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Domain Walls
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Low-dimensional Semiconductors
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Spin Current
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Bands and Photons in III-V Semiconductor Quantum Structures
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Microcavities
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Semiconductor Physics and Applications
Professor Minoru Sugawara, Hachinohe Institute of Technology, Hachinohe-city, Aomori 031, Japan. Fax: (0) 178 25 1430
| SKU | Unavailable |
| ISBN 13 | 9780198562870 |
| ISBN 10 | 019856287X |
| Title | Plasma Etching |
| Author | M Sugawara |
| Series | Series On Semiconductor Science And Technology |
| Condition | Unavailable |
| Binding Type | Hardback |
| Publisher | Oxford University Press |
| Year published | 1998-05-28 |
| Number of pages | 356 |
| Cover note | Book picture is for illustrative purposes only, actual binding, cover or edition may vary. |
| Note | Unavailable |